Simulation of shaped comb drive as a stepped actuator for microtweezers application-Reference-Cited by-同舟云学术

Simulation of shaped comb drive as a stepped actuator for microtweezers application

Published:2005-09 Issue: Volume:123-124 Page:540-546
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Harouche Isabelle P.F.,Shafai C.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference19 articles.

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2. Surface micromachined microengine as the driver for micromechanical gears;Garcia,1995

3. Laterally driven polysilicon resonant microstructures;Tang,1989

4. W.C. Tang, Electrostatic comb drive for resonant sensor and actuator application, Ph.D. Dissertation, University of California, Berkeley, CA, 1990.

5. Micromachined Transducers Sourcebook;Kovacs,1998

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