Electrically coupled MEMS bandpass filters-Reference-Cited by-同舟云学术

Electrically coupled MEMS bandpass filters

Published:2005-08 Issue:2 Volume:122 Page:307-316
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Pourkamali Siavash,Ayazi Farrokh

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. R.A. Johnson, Mechnical Filters in Electronics, Wiley Interscience, 1983.

2. High-order medium frequency micromechanical electronic filters;Wang;JMEMS,1999

3. A.-C. Wong, et al., Anneal-activated, tunable, 68MHz micromechanical filters, Sens. Actuators 99 (1999) 1390–1393.

4. Microelectromechanical filters for signal processing;Lin;JMEMS,1998

5. Coupled micromechanical drumhead resonators with practical applications as electromechanical bandpass filters;Greywall;J. Micromech. Microeng.,2002

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