Impact of adhesion promoters and sputter parameters on the electro-mechanical properties of Pt thin films at high temperatures-Reference-Cited by-同舟云学术

Impact of adhesion promoters and sputter parameters on the electro-mechanical properties of Pt thin films at high temperatures

Published:2019-01 Issue: Volume:285 Page:149-157
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Schmid P.,Zarfl C.,Triendl F.^ORCID,Maier F.J.,Schwarz S.,Schneider M.^ORCID,Schmid U.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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