Author:
Tibrewala A.,Phataralaoha A.,Büttgenbach S.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference12 articles.
1. Integration of a miniaturised triaxial force sensor in a minimally invasive surgical tool;Valdastri;IEEE Trans. Biomed. Eng.,2006
2. A silicon-based flexible tactile sensor for ubiquitous robot companion applications;Kim;J. Phys.: Conf. Ser.,2006
3. Novel 3D piezoresistive silicon force sensor for dimensional metrology of micro components;Ruther;IEEE Sens.,2005
4. Three-dimensional microfabrication for a multi-degree-of-freedom capacitive force sensor using fibre-chip coupling;Enikov;J. Micromech. Microeng.,2000
5. A novel design and characterization of a micro probe based on a silicon membrane for dimensional metrology;Phataralaoha,2005
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