Initial deflection of silicon-on-insulator thin membrane micro-mirror and fabrication of varifocal mirror-Reference-Cited by-同舟云学术

Initial deflection of silicon-on-insulator thin membrane micro-mirror and fabrication of varifocal mirror

Published:2011-12 Issue:2 Volume:172 Page:516-522
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Sasaki Takashi,Hane Kazuhiro

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference16 articles.

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3. An optically flat micro-mirror using a stretched membrane with crystallization-induced stress;Sasaki;J. Opt. A: Pure Appl. Opt.,2008

4. 3-D MOEMS mirror for laser beam pointing and focus control;Shao;IEEE J. Sel. Quant. Electron.,2004

5. MOEMS 3-D scan mirror for single-point control of beam deflection and focus;Shao;J. Microlith. Microfab. Microsyst.,2005

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