Optimization of acceleration and force ripple of planar motor based a chamfered magnet array considering coil end effect-Reference-Cited by-同舟云学术

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Optimization of acceleration and force ripple of planar motor based a chamfered magnet array considering coil end effect

Published:2024-04 Issue: Volume:369 Page:115119
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Liu Kai,Chen Fuxiang,Zhao Shuo,Zhang Hao,Hu Aoqi,Wu Yingtong,Zeng Lizhan

Funder

National Natural Science Foundation of China

National Key Research and Development Program of China

National Major Science and Technology Projects of China

Publisher

Elsevier BV

Reference28 articles.

1. High-NA EUV lithography exposure tool: key advantages and program progress;Van Schoot,2021

2. Craig De Young, E.U.V.: Enabling cost efficiency, tech innovation and future industry growth, (2019) 41.

3. EUV lithography scanner for sub-8nm resolution;van Schoot,2015

4. Analysis and optimization of a new 2-D magnet array for planar motor;Min;IEEE Trans. Magn.,2010

5. Optimization of Quasi-Halbach topologies to maximize the acceleration of moving-magnet planar motors;Kleijer,2022

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fluctuation Analysis of Electromagnetic Force in Magnetic Levitation Planar Motor;2024 10th International Conference on Control, Automation and Robotics (ICCAR);2024-04-27

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