Nonlinear and hysteretic influence of piezoelectric actuators in AFMs on lateral dimension measurement-Reference-Cited by-同舟云学术

Nonlinear and hysteretic influence of piezoelectric actuators in AFMs on lateral dimension measurement

Published:2006-01 Issue:2 Volume:125 Page:590-596
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Huang Qiangxian,Gonda Satoshi,Misumi Ichiko,Sato Osamu,Keem Taeho,Kurosawa Tomizo

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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