Process window of micromachined gyroscopes subjected to vibrational frequencies-Reference-Cited by-同舟云学术

Process window of micromachined gyroscopes subjected to vibrational frequencies

Published:2006-01 Issue:2 Volume:125 Page:519-525
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Chiou J. Albert

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference14 articles.

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4. A bulk silicon dissolved wafer process for microelectromechanical systems;Ghandani;J. Microelectromech. Syst.,1992

5. W.C. Tang, M.G. Lim, R.T. Howe, Electrostatically balanced comb drive for controlled levitation, in: Tech. Dig. Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, 1990, pp. 23–27.

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