A MEMS-based low pressure, light gas density and binary concentration sensor-Reference-Cited by-同舟云学术

A MEMS-based low pressure, light gas density and binary concentration sensor

Published:2011-11 Issue:2 Volume:171 Page:159-162
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Sparks D.,Smith R.,Patel J.,Najafi N.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference15 articles.

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5. Acoustic sensors for analyzing binary gas mixtures;Zipser;IEEE Sensors Journal,2006

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