On the design of GaAs (hhl) resonant cantilevers-Reference-Cited by-同舟云学术

On the design of GaAs (hhl) resonant cantilevers

Published:2006-11 Issue:1 Volume:132 Page:224-235
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Tellier C.R,Leblois T.G.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference30 articles.

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3. GaAs micro-beams for mechanical sensors;Leblois,2004

4. A piezoresistive GaAs pressure sensor with GaAs/AlGaAs membrane technology;Dehé;J. Micromech. Microeng.,1995

5. GaAs micromachining: 3D etching shapes, database and simulations;Tellier,2004

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