Modeling of fully hermetic electrostatic microfluidic valve actuator with increased displacement-Reference-Cited by-同舟云学术

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Modeling of fully hermetic electrostatic microfluidic valve actuator with increased displacement

Published:2023-10 Issue: Volume:360 Page:114519
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Vanagas Gailius,Dzedzickis Andrius,Bučinskas Vytautas,Viržonis Darius

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference19 articles.

1. Electrostatic-comb drive of lateral polysilicon resonators;Tang;Sens Actuators A Phys.,1990

2. A review of actuation and sensing mechanisms in MEMS-based sensor devices;Algamili;Nanoscale Res. Lett.,2021

3. Advances in capacitive micromachined ultrasonic transducers;Brenner;Micromachines,2019

4. Fabrication of 2-D capacitive micromachined ultrasonic transducer (CMUT) array through silicon wafer bonding;Wang;Micromachines,2022

5. Tilted folded-beam suspension for extending the stable travel range of comb-drive actuators;Zhou;J. Micromech. Microeng.,2003

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