Piezoelectric unimorph valve assembled on an LTCC substrate

Author:

Sobocinski M.,Juuti J.,Jantunen H.,Golonka L.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference20 articles.

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2. Technology and applications of low temperature cofired ceramic (LTCC) based sensors and microsystems;Golonka;Bull. Polish Acad. Sci.,2006

3. Overview of low temperature co-fired ceramics tape technology for meso-system technology (MsST);Gongora-Rubio;Sens. Actuat. A: Phys.,2001

4. Microfabricated plastic chips by hot embossing methods and their applications for DNA separation and detection;Lee;Sens. Actuat. B: Chem.,2001

5. Patterned deposition of cells and proteins onto surfaces by using three-dimensional microfluidic systems;Chiu;Proc. Natl. Acad. Sci. U.S.A.,2000

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