Empirical and theoretical characterisation of electrostatically driven MEMS structures with stress gradients-Reference-Cited by-同舟云学术

Empirical and theoretical characterisation of electrostatically driven MEMS structures with stress gradients

Published:2005-09 Issue: Volume:123-124 Page:555-562
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

De Coster J.,Tilmans H.A.C.,den Toonder J.M.J.,van Beek J.T.M.,Rijks Th.G.S.M.,Steeneken P.G.,Puers R.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference13 articles.

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5. 3D coupled electro-mechanics for mems: applications of ColSolve-EM;Gilbert,1995

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