Micromachined rectangular-spiral-coil actuator for radio-controlled cantilever-like actuation-Reference-Cited by-同舟云学术

Micromachined rectangular-spiral-coil actuator for radio-controlled cantilever-like actuation

Published:2015-05 Issue: Volume:226 Page:107-115
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Fong Jeffrey,Xiao Zhiming,Takahata Kenichi

Funder

Natural Sciences and Engineering Research Council of Canada

Canada Foundation for Innovation

British Columbia Knowledge Development Fund

Canadian Microelectronics Corporation

Canada Research Chairs

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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