Micro torsion mirror actuated by compound electrostatic driving structure-Reference-Cited by-同舟云学术

Micro torsion mirror actuated by compound electrostatic driving structure

Published:2007-04 Issue:2 Volume:135 Page:758-764
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Wu W.G.,Chen Q.H.,Yan G.Z.,Yin D.Q.,Chen Z.Y.,Hao Y.L.,Xu A.S.,Wang Y.Y.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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5. High speed, large deflection deformable mirrors for focus and spherical aberration control;Himiner,2002

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