Author:
Miao Jianmin,Hartnagel Hans L.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. Piezoelectric properties of GaAs for application in stress transducers;Fricke;J. Appl. Phys.,1991
2. J. Miao, K. Hjort, H.L. Hartnagel, J.A. Schweitz, D. Rueck, K. Tinschert, Resonant sensors on thin semi-insulating GaAs membranes, in: Proceedings of Transducers’95-Eurosensors IX, Stockholm, 1995, pp. 604–607.
3. Sacrificial etching of III–V compounds for micromechanical devices;Hjort;J. Micromech. Microeng.,1996
4. Hetero-micromachining of epitaxial III–V compound semiconductors;Peiner;Sens. Actuators,2000
5. Patterning of a micromechanical coplanar waveguide using a dry etching technique;Hascik;Vacuum,2003
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