Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference59 articles.
1. Novel 3D piezoresistive silicon force sensor for dimensional metrology of micro components;Ruther,2005
2. A silicon force sensor for robotics and medicine;Beebe;Sens. Actuators A: Phys.,1995
3. Design and fabrication of a hybrid silicon three-axial force sensor for biomechanical applications;Beccai;Sens. Actuators A: Phys.,2005
4. Characterization of a novel hybrid silicon three-axial force sensor;Valdastri;Sens. Actuators A: Phys.,2005
5. Benefits of force sensors.
Cited by
92 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献