Zinc oxide thin film-based MEMS acoustic sensor with tunnel for pressure compensation-Reference-Cited by-同舟云学术

Zinc oxide thin film-based MEMS acoustic sensor with tunnel for pressure compensation

Published:2008-02 Issue:2 Volume:141 Page:256-261
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Arora Aarti,Arora Anil,Dwivedi V.K.,George P.J.,Sreenivas K.,Gupta Vinay

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference17 articles.

1. PZT thin films for microsensors and actuators: Where do we stand?

2. Launching into The Great New Millennium. Piezoelectric Films for MEMS Applications.

3. Design, fabrication, and measurement of high-sensitivity piezoelectric microelectromechanical systems accelerometers

4. Structure design of micro touch sensor array

5. PZT thin films integration for the realisation of a high sensitivity pressure microsensor based on a vibrating membrane

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