A MEMS micromirror fabricated using CMOS post-process-Reference-Cited by-同舟云学术

A MEMS micromirror fabricated using CMOS post-process

Published:2005-05 Issue:2 Volume:120 Page:573-581
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Cheng Ying-Chou,Dai Ching-Liang,Lee Chi-Yuan,Chen Ping-Hei,Chang Pei-Zen

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference16 articles.

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2. Characterization of broad-band transmission for coplanar waveguides on CMOS silicon substrates;Milanovic;IEEE Trans. Microw. Theory Tech.,1998

3. Digital light processing and MEMS: an overview advanced applications of lasers in materials processing;Hornbeck,1996

4. Digital light processing: a new image technology for the television of the future;Monk;Int. Broadcasting Convention,1997

5. A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors;Hah,2003

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