Linear harmonic oscillatory rarefied gas flow with arbitrary frequency in comb finger blocks-Reference-Cited by-同舟云学术

Linear harmonic oscillatory rarefied gas flow with arbitrary frequency in comb finger blocks

Published:2021-11 Issue: Volume:331 Page:112997
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Tsimpoukis Alexandros^ORCID,Valougeorgis Dimitris^ORCID

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference49 articles.

1. Analysis and Design Principles of MEMS Devices;Bao,2005

2. Gas damping in vibrating MEMS structures;Veijola,2010

3. Inertial MEMS;Kempe,2011

4. Electrostatic-comb drive of lateral polysilicon resonators;Tang;Sens. Actuators A Phys.,1990

5. Resonant silicon sensors;Stemme;J. Micromech. Microeng.,1991

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