Design and fabrication of novel three-dimensional multi-electrode array using SOI wafer

Author:

Chu Huai-Yuan,Kuo Tzu-Ying,Chang Baowen,Lu Shao-Wei,Chiao Chuan-Chin,Fang Weileun

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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