In situ MEMS gradiometer with nanometer-resolution optical detection system-Reference-Cited by-同舟云学术

In situ MEMS gradiometer with nanometer-resolution optical detection system

Published:2010-04 Issue:1 Volume:159 Page:33-40
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Campanella Humberto,del Real R.P.,Duch Marta,Serre Christophe,Lucas I.,De Manuel V.,Guerrero Héctor,Esteve Jaume,Díaz-Michelena Marina,Plaza José A.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference33 articles.

1. Magnetic sensors and their applications;Lenz;IEEE Sens. J.,2006

2. Magnetic technologies for space: COTS sensors for flight applications and magnetic testing facilities for payloads;Michelena;Sensor Lett.,2007

3. Modeling and fabrication of a MEMS magnetostatic magnetic sensor;Ciudad;Sens. Actuators A: Phys.,2004

4. Resonant magnetic microsensor with μT resolution;Brugger;Proc. IEEE Int. Conf. MEMS,2008

5. Ferromagnetic micromechanical magnetometer;Yang;Sens. Actuators A: Phys.,2002

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. 100 pT/cm single-point MEMS magnetic gradiometer from a commercial accelerometer;Microsystems & Nanoengineering;2020-08-10

2. Magnetopneumography Using Optical Position Reference;Sensor Letters;2013-01-01

3. Comparative performance of static-mode ferrous MEMS gradiometers fabricated by a three-step DRIE process;Journal of Micromechanics and Microengineering;2010-05-21