Waveform design for pulse-and-hold electrostatic actuation in MEMS-Reference-Cited by-同舟云学术

Waveform design for pulse-and-hold electrostatic actuation in MEMS

Published:2007-02 Issue:1 Volume:134 Page:213-220
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Sumali Hartono,Massad Jordan E.,Czaplewski David A.,Dyck Christopher W.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference14 articles.

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2. RF MEMS Theory, Design and Technology;Rebeiz,2003

3. Fabrication and characterization of ohmic contacting RF MEMS switches;Dyck;SPIE Conf. Micromach. Microfabrication,2004

4. Characterization techniques for surface-micromachined devices;Eaton;Proc. SPIE,1998

5. Vibration measurement of microstructures by means of laseroptical modal analysis;Schnitzer;Proc. SPIE,1999

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