A method for open-loop control of dynamic motions of piezo-stack actuators

Author:

Arda Gozen B.,Burak Ozdoganlar O.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference23 articles.

1. Atomic force microscope;Binnig;Physical review letters,1986

2. Design and evaluation of a mechanical nanomanufacturing system for nanomilling;Gozen;Precision Engineering,2011

3. Sliding-mode enhanced adaptive motion tracking control of piezoelectric actuation systems for micro/nano manipulation;Shirinzadeh;IEEE Transactions on Control Systems Technology,2008

4. Asymmetric-hysteresis compensation in piezoelectric actuators;Aguirre;Mechanical Systems and Signal Processing,2011

5. A survey of control issues in nanopositioning;Devasia;IEEE Transactions on Control Systems Technology,2007

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