Piezoelectric circular microdiaphragm based pressure sensors-Reference-Cited by-同舟云学术

Piezoelectric circular microdiaphragm based pressure sensors

Published:2010-09 Issue:1 Volume:163 Page:32-36
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Olfatnia M.,Xu T.,Miao J.M.,Ong L.S.,Jing X.M.,Norford L.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference14 articles.

1. The effect of design and process parameters on electromechanical coupling for a thin-film PZT membrane;Al-Hattamleh;Journal of Microelectromechanical Systems,2006

2. Micromachined piezoelectric membranes with high nominal quality factors in Newtonian liquid media: a Lamb's model validation at the microscale;Ayela;Sensors and Actuators B: Chemical,2007

3. PZT thin films integration for the realisation of a high sensitivity pressure microsensor based on a vibrating membrane;Defaÿ;Sensors and Actuators A: Physical,2002

4. Nondegenerate normal-mode doublets in vibrating flat circular plates;Deutsch;American Journal of Physiology,2004

5. Residual stress development in Pb(Zr,Ti)O3/ZrO2/SiO2 stacks for piezoelectric microactuators;Hong;Thin Solid Films,2006

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