Characterization of packaged inline-type radio frequency microelectromechanical systems power sensors-Reference-Cited by-同舟云学术

Characterization of packaged inline-type radio frequency microelectromechanical systems power sensors

Published:2013-10 Issue: Volume:201 Page:294-301
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Zhang Zhiqiang,Liao Xiaoping

Funder

National Natural Science Foundation of China

Scientific Research Foundation of Graduate School of Southeast University

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference23 articles.

1. Packaging-test-fixture for in-line coupling RF MEMS power sensors;Zhang;Journal of Microelectromechanical Systems,2011

2. Integrated microwave power sensor;Dehe;Electronics Letters,1995

3. A capacitive RF power sensor based on MEMS technology;Fernandez;Journal of Micromechanics and Microengineering,2006

4. A microwave power sensor based on GaAs MMIC technology;Han;Journal of Micromechanics and Microengineering,2007

5. Micromachined thermocouple microwave detector by commercial CMOS fabrication;Milanovic;IEEE Transactions on Microwave Theory and Techniques,1998

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Thermoelectric MEMS Microwave Power Sensor with Inline Self-Detection Function;Micromachines;2022-01-31

2. A Microwave Power Sensor;Micro/Nano Technologies;2018

3. A Microwave Power Sensor;Toxinology;2017-09-26

4. Analysis and experiment of temperature effect on the thermoelectric power sensor;Sensors and Actuators A: Physical;2015-04