Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane—Part 1. Optical absorptivity-Reference-Cited by-同舟云学术

Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane—Part 1. Optical absorptivity

Published:2009-06 Issue:2 Volume:152 Page:119-125
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Jutzi F.,Wicaksono D.H.B.,Pandraud G.,de Rooij N.,French P.J.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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5. Uncooled thermopile infrared detector linear arrays with detectivity greater than 109cmHz1/2/W;Foote;IEEE. Trans. Electron. Dev.,1998

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