Optimization of a pulsed carbon dioxide snow jet for cleaning CMOS image sensors by using the Taguchi method

Author:

Yang Sheng-Chung,Huang Keng-Shiang,Lin Yu-Cheng

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. Precision cleaning is a quality concern;Osborn;Manuf. Eng.,2003

2. International Technology Roadmap for Semiconductors;SEMATECH,2005

3. Application of ice particles for precision cleaning of sensitive surface;Shishkin;J. Electron. Packaging,2002

4. An overview of supercritical CO2 applications in microelectronics processing;Weibel;Microelectron. Eng.,2003

5. Cleaning surface with dry ice;Hoenig;Compressed Air Mag.,1986

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