Identification and adjustment of the position and attitude for the electrostatic accelerometer's proof mass-Reference-Cited by-同舟云学术

Identification and adjustment of the position and attitude for the electrostatic accelerometer's proof mass

Published:2012-11 Issue: Volume:187 Page:190-193
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Fan Da,Liu Yunfeng,Han Fengtian,Dong Jingxin

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. The Matlab/Simulink modeling and numerical simulation of an analogue capacitive micro-accelerometer;Grigorie,2008

2. Progress on electrostatic space accelerometer;Li-Shude;Journal of Geodesy and Geodynamics,2005

3. K. Akila, Design and modeling of a MEMS based accelerometer with pull in analysis, M.Sc. Thesis, Electrical & Computer Engineering, The University of British Columbia, 2008.

4. Introduction to Control Engineering;Dong,2009

5. Servo loop design of capacitive MEMS accelerometer under high preload voltage;Fan,2011

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Study on loss of performance in inertial sensors due to electrode asymmetry;Chinese Optics;2019

2. Modeling and compensation of cross-axis coupling in an electrostatic accelerometer for testing the equivalence principle;Review of Scientific Instruments;2018-12

3. Identification and compensation of quadratic terms of a space electrostatic accelerometer;Review of Scientific Instruments;2018-11

4. A ΣΔ Closed-Loop Interface for a MEMS Accelerometer with Digital Built-In Self-Test Function;Micromachines;2018-09-06

5. A New Rotational Stepwise Mechanical Energy Harvester for Biomedical Implants;Sensors and Materials;2018-06-29