1. RF MEMS switches and switch circuits;Rebeiz;IEEE Microwave Magazine,2001
2. MEMS for future microwave system;De Los Santos,2005
3. Photoresist as a sacrificial layer by dissolution in acetone;Walsh,2001
4. (LAAS-CNRS), IMEC Training: MEMS in RF and MW Electronics;Grenier,2005
5. Simulation of density and step coverage for via metallization;Smy,1989