Phase noise analysis of micromechanical silicon resonant accelerometer-Reference-Cited by-同舟云学术

Phase noise analysis of micromechanical silicon resonant accelerometer

Published:2013-08 Issue: Volume:197 Page:15-24
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Shi Ran,Jia Fang-xiu,Qiu An-ping,Su Yan

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. Micro Inertial Instrument: Micromechanical Accelerometer;Dong,2003

2. Oscillator phase noise: a tutorial;Lee;IEEE Journal of Solid-State Circuits,2000

3. A simple model of feedback oscillator noise spectrum;Lesson;Proceedings of the IEEE,1966

4. T.A. Roessig, Integrated MEMS tuning fork oscillators for sensor applications, Ph.D. Dissertation, University of California, Berkeley, 1998.

5. K.E. Wojciechowski, Electronics for resonant sensors, Ph.D. Dissertation, University of California, Berkeley, 2005.

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Digital Closed-Loop Control System for MEMS Resonant Pressure Sensors Based on a Quadrature Phase-Locked Loop;IEEE Sensors Journal;2024-04-01

2. A Novel Frequency Readout Method and Circuit for Navigation-Grade Vibrating Beam Accelerometers;IEEE Sensors Journal;2023-09-15

3. Comparing Different Output Metrics of High-Resolution MEMS Weakly Coupled Resonant Tilt Sensors;IEEE Sensors Journal;2023-04-01

4. Phase Noise Optimization of MEMS Resonant Accelerometer Based on AC Polarization;Journal of Microelectromechanical Systems;2023-02

5. Phase noise modelling of MEMS resonant accelerometer with non-AGC-driven circuit;Journal of Micromechanics and Microengineering;2022-04-13