A dual-mass fully decoupled MEMS gyroscope with wide bandwidth and high linearity-Reference-Cited by-同舟云学术

A dual-mass fully decoupled MEMS gyroscope with wide bandwidth and high linearity

Published:2017-06 Issue: Volume:259 Page:50-56
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Wu G.Q.,Chua G.L.,Gu Y.D.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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3. A HARPSS polysilicon vibrating ring gyroscope;Ayazi;J. Microelectromech. Syst.,2001

4. A compact angular rate sensor system using a fully decoupled silicon-on-glass MEMS gyroscope;Alper;J. Microelectromech. Syst.,2008

5. A high-resolution silicon-onglass Z-axis gyroscope operating at atmospheric pressure;Ding;IEEE Sens. J.,2010

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