Funder
MOST of China
National Natural Science Foundation of China
Key Research Program of Frontier Sciences of Chinese Academy of Sciences
DongGuan Innovative Research Team Program
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference29 articles.
1. A review of MEMS oscillators for frequency reference and timing applications;Van Beek;J. Micromech. Microeng.,2011
2. MEMS technology for timing and frequency control;Nguyen;IEEE Trans. Ultrason. Ferroelectr. Freq. Control.,2007
3. Micromachined resonators: a review;Abdolvand;Micromachines,2016
4. Dependence of temperature coefficient of frequency (TCf) on crystallography and eigenmode in N-doped silicon contour mode micromechanical resonators;Zhu;Sens. Actuators A Phys.,2014
5. Ovenized dual-mode clock (ODMC) based on highly doped single crystal silicon resonators, in: IEEE Int;Chen;Conf. Micro Electro Mech. Syst.,2016
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