Author:
Wang Z.F.,Cao W.,Shan X.C.,Xu J.F.,Lim S.P.,Noell W.,de Rooij N.F.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference17 articles.
1. MEMS: the path to large optical crossconnnects;Chu;IEEE Commun. Mag.,2002
2. MEMS optical switches;Yeow;IEEE Commun. Mag.,2001
3. Surface micromachined free space fiber-optic switches;Lee;Electr. Lett.,1995
4. M.M. Koh, W. Menz, Micro optical switching by electrostatic linear actuators with large displacements, in: Proceedings of the Seventh International Conference on Solid-State Sensors and Actuators, Yokohama, Japan, 1993, pp. 120–123.
5. LIGA microstructures on top of micromachined silicon wafers used to fabricated a micro-optical switch;Müller;J. Micromech. Microeng.,1993
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