Long-term stability of single-crystal silicon microresonators-Reference-Cited by-同舟云学术

Long-term stability of single-crystal silicon microresonators

Published:2004-09 Issue:1 Volume:115 Page:23-27
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Koskenvuori M.,Mattila T.,Häärä A.,Kiihamäki J.,Tittonen I.,Oja A.,Seppä H.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. J.R. Vig, A. Ballato, in E.P. Papadakis (Ed.), Ultrasonic Instruments and Devices, Academic Press, 1999 (Chapter 7).

2. IEEE Std. 802.15.1; IEEE Std. 802.15.4.

3. Fundamental limits of the frequency stabilities of crystal oscillators;Walls;IEEE Trans. Ultrason. Ferroelect. Freq. Contr.,1995

4. D. Salt, Handbook of Quartz Crystal Devices, Van Nostrand Reinhold, Wokingham, UK, 1987.

5. B. Razavi, RF Microlectronics, Prentice Hall, USA, 1998, p. 214.

Cited by 29 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fatigue of Micro-Electro-Mechanical Systems (Mems) Thin Films;Comprehensive Structural Integrity;2023

2. Electrostatic and RF-properties of MEMS structures;Handbook of Silicon Based MEMS Materials and Technologies;2020

3. 3D-encapsulated VHF MEMS resonator with high frequency stability and low vibration sensitivity;Sensors and Actuators A: Physical;2019-02

4. Reliability testing of a 3D encapsulated VHF MEMS resonator;Journal of Semiconductors;2018-10

5. Micromachined Resonant Frequency Tuning Unit for Torsional Resonator;Micromachines;2017-11-25