Design of nano-gap piezoelectric resonators for mechanical RF magnetic field modulation-Reference-Cited by-同舟云学术

Design of nano-gap piezoelectric resonators for mechanical RF magnetic field modulation

Published:2007-02 Issue:1 Volume:134 Page:239-244
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

White C.D.,Piazza G.,Stephanou P.J.,Pisano A.P.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. MEMS technology for the fabrication of RF magnetic components;Allen;IEEE Trans. Magn.,2003

2. A CMOC-MEMS magnetic thin-film inductor for radio frequency and intermediate frequency filter circuits;Zhang,2004

3. Micromachined thin film bulk acoustic resonators;Ruby,1994

4. Dry release post-CMOS compatible contour mode aluminum nitride mechanical resonators for VHF applications;Piazza;Hilton Head,2004

5. Nano-gap piezoelectric resonators for mechanical RF magnetic field modulation;White,2005

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