Fabrication of organic PVP doping-based Ba0.5Sr0.5TiO3 thick films on silicon substrates for MEMS applications

Author:

Wang Zheyao,Liu Jianshe,Ren Tianling,Liu Litian

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference31 articles.

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3. A new type of dielectric bolometer mode of detector pixel using ferroelectric thin film capacitors for infrared image sensor;Noda;Sens. Actuators A,1999

4. Development of Si monolithic ferroelectric-microbolometer using pulsed-laser-deposited (Ba,Sr)TiO3 thin-film for uncooled chopperless infrared sensing;Noda;Sens. Mater.,2000

5. Microstructure and hydrogen gas sensitivity of amorphous (Ba,Sr)TiO3 thin film sensors;Zhu;Sens. Actuators B,2000

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