A high sensitivity surface-micromachined pressure sensor-Reference-Cited by-同舟云学术

A high sensitivity surface-micromachined pressure sensor

Published:2013-10 Issue: Volume:201 Page:274-280
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Godovitsyn I.V.,Amelichev V.V.,Pankov V.V.

Funder

The Ministry of Education and Science of the Russian Federation

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference24 articles.

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5. Multifunctional smart tactile-image sensor with integrated arrays of strain and temperature sensors on single air-pressurized silicon diaphragm;Takao,2005

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