Deposition of ZnO thin films by RF&DC magnetron sputtering on silicon and porous-silicon substrates for pyroelectric applications-Reference-Cited by-同舟云学术

Deposition of ZnO thin films by RF&DC magnetron sputtering on silicon and porous-silicon substrates for pyroelectric applications

Published:2017-06 Issue: Volume:260 Page:24-28
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Cicek K.,Karacali T.,Efeoglu H.,Cakmak B.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference24 articles.

1. Partial-electroded ZnO pyroelectric sensors for responsivity improvement;Wei;Sens. Actuators A: Phys.,2006

2. Temperature field analysis for ZnO thin-film pyroelectric devices with partially covered electrode;Hsiao;Sens. Mater.,2012

3. Structural studies of zinc oxide films grown by RF magnetron sputtering;Sayago;Synth. Met.,2005

4. Film bulk acoustic resonator fabrication for radio frequency filter applications;Park;Jpn. J. Appl. Phys.,2000

5. Fabrication of a ZnO pyroelectric sensor;Hsiao;Sensors,2008

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