Responsivity and sensitivity of piezoelectric MEMS resonators at higher order modes in liquids-Reference-Cited by-同舟云学术

Responsivity and sensitivity of piezoelectric MEMS resonators at higher order modes in liquids

Published:2019-08 Issue: Volume:295 Page:84-92
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Pfusterschmied Georg,Patocka Florian,Weinmann Christoph,Schneider Michael^ORCID,Platz Daniel,Schmid Ulrich

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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4. Miniaturized sensors for the viscosity and density of liquids--performance and issues;Jakoby;IEEE Trans. Ultrason. Ferroelectr. Freq. Control,2010

5. Characterizing vibrating cantilevers for liquid viscosity and density sensing;Riesch;J. Sens.,2008

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