Modelling analysis for design of microshutters with new electrode configuration
-
Published:2022-08
Issue:
Volume:343
Page:113661
-
ISSN:0924-4247
-
Container-title:Sensors and Actuators A: Physical
-
language:en
-
Short-container-title:Sensors and Actuators A: Physical
Author:
Ke Ming,Kutyrev Alexander S.,Kotecki Carl A.,Kim Kyowon,Greenhouse Matthew A.,Chang Meng-Ping,Fettig Rainer,Brekosky Regis P.,Hu Yongjie
Funder
Alfred P. Sloan Foundation
U.S. Air Force
National Science Foundation
Massachusetts Institute of Technology
Harvard University
American Society of Mechanical Engineers
National Aeronautics and Space Administration
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference15 articles.
1. 2-D electrostatic actuation of microshutter arrays;Burns;J. Micro Syst.,2016
2. A MEMS electrostatic roll-up window shade array for house energy management system;Mori;IEEE Photonics Technol. Lett.,2016
3. MEMS microshutter SLM for intensity modulation;Karpinsky,1999
4. High-speed micro-electromechanical light modulation arrays;Perregaux,1997
5. Arrays of addressable contactless optical microshutters;Gonseth;Microsyst. Technol.,2005
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. An enhanced contrast evaluation testbed for next-generation microshutter arrays;UV, X-Ray, and Gamma-Ray Space Instrumentation for Astronomy XXIII;2023-10-05