Author:
Park Joon-Shik,Park Hyo-Derk,Kang Sung-Goon
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference12 articles.
1. M. Hoffman, H. Küppers, T. Schneller, U. Böttger, U. Schnakenber, W. Mokwa, R. Waser, A new concept and first development results of PZT thin film actuator, vol. 1, in: Proceedings of the 2000 Twelvth IEEE International Symposium on Applications of Ferroelectrics, Hawaii, USA, 2000, pp. 519–524.
2. A valve less diffuse/nozzle based fluid pump;Stemme;Sens. Actuator,1993
3. T. Itoh, T. Suga, Self-exited force sensing micro cantilevers with piezoelectric thin film for dynamic force microscopy, Transducers’95 (1995) 632–635.
4. Application of gas jet deposition method to piezoelectric thick film miniature actuator;Schroth;Jpn. J. Appl. Phys,1998
5. Sol–gel drives ferroelectric thin films in silicon micromachining;Hsueh;Int. Ferroelectr,1993
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