A coupled-mode analysis of mode localization on weakly-coupled silicon micromechanical resonators with damping-Reference-Cited by-同舟云学术

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A coupled-mode analysis of mode localization on weakly-coupled silicon micromechanical resonators with damping

Published:2024-11 Issue: Volume:378 Page:115822
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Zhang Man-Na,Wang Rui,Zhang Shang-Yang,Wang Li-Feng,Huang Qing-An

Publisher

Elsevier BV

Reference35 articles.

1. Resonant MEMS: Fundamentals, Implementation, and Application;Fedder,2015

2. MEMS technology for timing and frequency control;Nguyen;IEEE Trans. Ultrason. Ferroelectr. Freq. Control,2007

3. A review of MEMS oscillators for frequency reference and timing applications;Van Beek;J. Micromech. Microeng.,2012

4. Micromachined resonators: a review;Abdolvand;Micromachines,2016

5. CMOS-MEMS resonators and oscillators: a review;Chen;Sens. Mater.,2018

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