Author:
Hsu Yi-Chu,Wu Chia-Che,Lee Cheng-Chun,Cao G.Z.,Shen I.Y.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference47 articles.
1. An active head slider using a piezoelectric cantilever for in-situ flying-height control;Suzuki;IEEE Trans. Magn,2003
2. S.M. Sze, Semiconductor Sensors, Wiley, New York, 1994, Chapter 9.
3. Processing and characterization of piezoelectric materials and integration into microelectromechanical systems;Polla;Annu. Rev. Mater. Sci,1998
4. Ferroelectric thin films for micro-sensors and actuators: a review;Muralt;J. Micromech. Microeng,2000
5. E.J. Seibel, M. Fauver, J. Crossman-Bosworth, Q.Y.L. Smithwick, C.M. Brown, Microfabricated optical fiber with microlens that produces large field-of-view, video rate, optical beam scanning for microendoscopy applications, in: I. Gannot (Ed.), Optical Fibers and Sensors for Medical Applications III, Proc. SPIE 4957 (2003) 46–55.
Cited by
63 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献