Fabrication of monolithically integrated flow sensor on tube-Reference-Cited by-同舟云学术

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Fabrication of monolithically integrated flow sensor on tube

Published:2010-09 Issue:1 Volume:163 Page:61-67
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Shikida M.,Yokota T.,Ukai S.,Sato K.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference26 articles.

1. R.S. Muller, R.T. Howe, S.D. Senturia, R.L. Smith, R.M. White, Microsensor, IEEE Press, 1990.

2. L. Ristic, Sensor technology and devices, Artech house, Inc., 1994.

3. N. Maluf, An introduction to microelectromechanical systems engineering, Artech house, Inc., 2000.

4. A micromachined flow shear-stress sensor based on thermal transfer principle;Liu;Journal of Microelectromechanical Systems,1999

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. An integrated temperature-compensated flexible shear-stress sensor microarray with concentrated leading-wire;Review of Scientific Instruments;2016-02

2. Fabrication, characterization, and simulation of a cantilever-based airflow sensor integrated with optical fiber;Applied Optics;2013-05-10

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