Infrared integrated optical evanescent field sensor for gas analysis

Author:

Siebert Ralf,Müller Jörg

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. Prospects for fibre-optic evanescent-field gas sensors using absorption in the near-infrared;Stewart;Sensors Actuat. B,1997

2. A. Messica, A. Katzir, U. Schiessl, M. Tacke, Liquid and gas fiberoptic evanescent wave spectroscopy by tunable lasers, in: Proceedings of the SPIE, vol. 1591, Infrared Fiber Optics III, 1991, pp. 192–200.

3. 0.15dB/cm loss in unibond SOI waveguide;Ang;Electron. Lett.,1999

4. R. Siebert, J. Müller, Infrared integrated optical evanescent field sensor for gas analysis part II: fabrication, Sensors Actuat., doi:10.1016/j.sna.2004.09.020.

5. R. Siebert, Integriert-optische Evaneszentfeld-Lichtwellenleiter für die Gasanalyse im mittleren Infrarotbereich, Dissertation at the TU Hamburg-Harburg, Department of Microsystem Technology, VDI Verlag, Fortschritt-Berichte, Reihe 8, Nr.:1043, Düsseldorf, 2004.

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