Author:
Chang Sung-Pil,Allen Mark G.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference10 articles.
1. CMOS micro electro mechanical systems;Baltes;Sens. Mater,1997
2. SCREAM microelectromechanical systems;MacDonald;Microelectron. Eng,1996
3. R.T. Howe, Applications of silicon micromachining to resonator fabrication, in: Proceedings of the 1994 IEEE International Frequency Control Symposium (the 48th Annual Symposium), Cat. No. 94CH3446-2, 1994, pp. 2–7.
4. C.H. Mastrangelo, X. Zhang, W.C. Tang, Surface micromachined capacitive differential pressure sensor with lithographically-defined silicon diaphragm, in: Proceedings of the International Solid-State Sensors and Actuators Conference-TRANSDUCERS’95, vol. 1, 25–29 June 1995, pp. 612–615.
5. R.R. Tummala, Fundamentals of Microsystems Packaging, McGraw-Hill, New York, 2001.
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