Author:
Ross David S.,Cabal Antonio,Trauernicht David,Lebens John
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
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4. Micromechanical actuators based on thermal expansion effects;Reitmuller,1987
5. Electrically activated normally closed diaphragm valves;Jerman;J. Micromech. Microeng.,1994
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