A spectroscopic study distinguishing between chemical phase separation with different degrees of crystallinity in Zr(Hf) silicate alloys
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference7 articles.
1. The Structure of Plasma-Deposited and Annealed Pseudo-Binary ZrO2-SiO2 Alloys
2. Nonlinear composition dependence of x-ray photoelectron spectroscopy and Auger electron spectroscopy features in plasma-deposited zirconium silicate alloy thin films
3. High temperature stability in lanthanum and zirconia-based gate dielectrics
4. Hafnium and zirconium silicates for advanced gate dielectrics
5. High-κ gate dielectrics: Current status and materials properties considerations
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