Secondary electron imaging of SiC-based structures in secondary electron microscope
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference18 articles.
1. Atomic step imaging on silicon surfaces by scanning electron microscopy
2. Preferential carbon etching by hydrogen inside hexagonal voids of 6H-SiC(0001)
3. Two-dimensional Dopant Profiling and Imaging of 4H Silicon Carbide Devices by Secondary Electron Potential Contrast
4. Field-emission SEM imaging of compositional and doping layer semiconductor superlattices
5. Electronic contribution to secondary electron compositional contrast in the scanning electron microscope
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